Hakaru Kyuragi: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

The influence of stud bumping stress on device degradation in scaled MOSFETs

Nobuhiro Shimoyama, Katsuyuki Machida, Masakazu Shimaya, Hiroshi Koizumi, Hakaru Kyuragi

Journal:

Microelectronics Reliability

Year:

2000

Language:

english

File:

PDF, 1.31 MB

english, 2000

2

A electrostatic micromechanical switch for logic operation in multichip modules on Si

Akihiko Hirata, Katsuyuki Machida, Hakaru Kyuragi, Masahiko Maeda

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.16 MB

english, 2000

3

Advanced Spin Coating Film Transfer and Hot-Pressing Process for Global Planarization with Dielectric-Material-Viscosity Control

Sato, Norio, Machida, Katsuyuki, Yano, Masaki, Kudou, Kazuhisa, Kyuragi, Hakaru

Journal:

Japanese Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 488 KB

english, 2002

4

Synchrotron radiation-induced etching of a carbon film in an oxygen gas

Kyuragi, Hakaru, Urisu, Tsuneo

Journal:

Applied Physics Letters

Year:

1987

Language:

english

File:

PDF, 456 KB

english, 1987

5

Dispersive characteristics of one-dimensional Fresnel zone plates measured using synchrotron radiation

Hakaru Kyuragi, Tsuneo Urisu

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1986

Language:

english

File:

PDF, 757 KB

english, 1986

6

Copper Damascene Interconnection with Tungsten Silicon Nitride Diffusion Barrier Formed by Electron Cyclotron Resonance Plasma Nitridation

Hirata, Akihiko, Machida, Katsuyuki, Awaya, Nobuyoshi, Kyuragi, Hakaru, Maeda, Masahiko

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 604 KB

english, 1999

7

Synchrotron radiation stimulated semiconductor processes: Chemical vapor deposition and etching

Urisu, Tsuneo, Kyuragi, Hakaru, Utsumi, Yuichi, Takahashi, Jun-ichi, Kitamura, Mamoru

Journal:

Review of Scientific Instruments

Year:

1989

Language:

english

File:

PDF, 572 KB

english, 1989

8

Synchrotron radiation-excited chemical vapor deposition of SixNyHz film

Kyuragi, Hakaru, Urisu, Tsuneo

Journal:

Journal of Applied Physics

Year:

1987

Language:

english

File:

PDF, 561 KB

english, 1987

9

SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Micromachining and Microfabrication - Microfabrication technology for high-speed Si-based systems

Ishii, Hiromu, Yagi, Shouji, Saito, Kunio, Hirata, Akihiko, Kudou, Kazuhisa, Yano, Masaki, Nagatsuma, Tadao, Machida, Katsuyuki, Kyuragi, Hakaru, Chau, Kevin H., Parameswaran, M., Tay, Francis E.

Year:

2000

Language:

english

File:

PDF, 1.30 MB

english, 2000

10

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - Method for testing electrostatic discharge tolerance for fingerprint sensor LSI

Tanabe, Yasuyuki, Unno, Hideyuki, Machida, Katsuyuki, Sato, Norio, Ishii, Hiromu, Shigematsu, Satoshi, Morimura, Hiroki, Kyuragi, Hakaru, Ramesham, Rajeshuni

Year:

2001

Language:

english

File:

PDF, 541 KB

english, 2001

11

Stress-Induced Device Degradation Due to Die-Attachment Process after Area Bump Formation

Shimoyama, Nobuhiro, Machida, Katsuyuki, Shimaya, Masakazu, Kyuragi, Hakaru

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 462 KB

english, 1999

12

Evaluation of Sensitivity on a Capacitive Fingerprint Sensor LSI with a Grounded Wall Structure

Morimura, Hiroki, Shigematsu, Satoshi, Shimamura, Toshishige, Sato, Norio, Machida, Katsuyuki, Kyuragi, Hakaru

Journal:

Japanese Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 275 KB

english, 2002

13

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Gold damascene interconnect technology for millimeter-wave photonics on silicon

Ishii, Hiromu, Yagi, Shouji, Minotani, Tadashi, Royter, Yakov, Kudou, Kazuhisa, Yano, Masaki, Nagatsuma, Tadao, Machida, Katsuyuki, Kyuragi, Hakaru, Karam, Jean Michel, Yasaitis, John A.

Year:

2001

Language:

english

File:

PDF, 592 KB

english, 2001

14

INNOVATIVE INTEGRATION BASED ON SILICON-CORE TECHNOLOGIES FOR SENSOR AND COMMUNICATIONS APPLICATIONS

NAGATSUMA, TADAO, MACHIDA, KATSUYUKI, ISHII, HIROMU, SAHRI, NABIL, SHINAGAWA, MITSURU, KYURAGI, HAKARU, YAMADA, JUNZO

Journal:

International Journal of High Speed Electronics and Systems

Year:

2000

Language:

english

File:

PDF, 1.49 MB

english, 2000

15

A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing

Sato, Norio, Ishii, Hiromu, Shigematsu, Satoshi, Morimura, Hiroki, Kamei, Toshikazu, Kudou, Kazuhisa, Yano, Masaki, Machida, Katsuyuki, Kyuragi, Hakaru

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 434 KB

english, 2003

16

Lattice-Matched LPE Growth of In 1- x Ga x P 1- y As y Layers on (100) GaAs Substrates

Suzuki, Akira, Kyuragi, Hakaru, Matsumura, Shigeo, Matsunami, Hiroyuki

Journal:

Japanese Journal of Applied Physics

Year:

1980

Language:

english

File:

PDF, 313 KB

english, 1980

17

Higher-order suppressed phase zone plates

Kyuragi, Hakaru, Urisu, Tsuneo

Journal:

Year:

1985

Language:

english

File:

PDF, 322 KB

english, 1985

18

Diffusion Barrier Mechanism of Extremely Thin Tungsten Silicon Nitride Film Formed by ECR Plasma Nitridation

Hirata, Akihiko, Machida, Katsuyuki, Maeyama, Satoshi, Watanabe, Yoshio, Kyuragi, Hakaru

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 926 KB

1998

19

A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon

Ishii, Hiromu, Sahri, Nabil, Nagatsuma, Tadao, Machida, Katsuyuki, Saito, Kunio, Yagi, Shouji, Yano, Masaki, Kudo, Kazuhisa, Kyuragi, Hakaru

Journal:

Japanese Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 332 KB

english, 2000

20

Microfabrication Technology for Millimeter-Wave Photonic Systems on Si

Ishii, Hiromu, Minotani, Tadashi, Royter, Yakov, Yagi, Shouji, Kudou, Kazuhisa, Yano, Masaki, Nagatsuma, Tadao, Machida, Katsuyuki, Kyuragi, Hakaru

Journal:

IEEJ Transactions on Sensors and Micromachines

Year:

2004

File:

PDF, 1.57 MB

2004

21

Tungsten-beryllium multilayer mirrors for soft x rays

Utsumi, Yuichi, Kyuragi, Hakaru, Urisu, Tsuneo, Maezawa, Hideki

Journal:

Year:

1988

Language:

english

File:

PDF, 522 KB

english, 1988

22

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Design, Characterization, and Packaging for MEMS and Microelectronics II - Novel testing scheme for selection of capacitive fingerprint sensor LSIs

Shimamura, Toshishige, Morimura, Hiroki, Unno, Hideyuki, Fujii, Koji, Shigematsu, Satoshi, Machida, Katsuyuki, Kyuragi, Hakaru, Franzon, Paul D., Malshe, Ajay P., Tay, Francis E.

Year:

2001

Language:

english

File:

PDF, 296 KB

english, 2001

23

Synchrotron Radiation-Excited Chemical Vapor Deposition of Silicon Nitride Films from a SiH[sub 4] + NH[sub 3] Gas Mixture

Kyuragi, Hakaru

Journal:

Journal of The Electrochemical Society

Year:

1991

Language:

english

File:

PDF, 603 KB

english, 1991

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски